Amin impurity analysis - List of Manufacturers, Suppliers, Companies and Products

Analysis of amine impurities in clean room atmosphere

Analyze a humidifier containing propanol by gas chromatography using a WAX column!

I would like to introduce the analysis of amine impurities in clean room atmosphere. In the fabrication of semiconductors and MEMS devices, gaseous impurities in the clean room atmosphere have become a problem due to their adverse effects. In particular, basic impurities such as ammonia and amines are known to cause shape abnormalities in chemically amplified resists. We will report on the analysis method for the amine compound 2-amino-2-methyl-1-propanol (isobutanol amine) using Sylph. For more details, please refer to the PDF document. We encourage you to take a look. [Overview] ■ Analysis by Sylph - Humidifiers containing 2-amino-2-methyl-1-propanol were introduced into a gas bag, and analysis was conducted using a WAX column. *For more details, please download the PDF or feel free to contact us.